微纳米三坐标测量机三轴垂直度误差测量及建模补偿

doi:10.3969/j.issn.1000-1158.2022.04.03

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Abstract The perpendicularity error is one of an important error sources of micro-nano coordinate measuring machines (CMMs). This error should be measured with high accuracy and compensated by an effective model. The measurement setup based on PSD was used to measure the straightness errors which can be transformed into the perpendicularity errors of the micro-nano CMM. A model for perpendicularity errors of the micro-nano CMM was built and used to compensate the errors. Several 0-class gauge blocks were measured and the measuring errors in X and Y directions of the blocks were reduced by 11μm and 5μm respectively after the compensation. The correctness of the perpendicularity error measuring method and the effectiveness of the compensation model were validated.

Key words： metrology micro-nano CMM perpendicularity error modeling compensation

Received: 22 April 2021 Published: 08 April 2022

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TB92

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	Articles by authors
	LI Rui-jun
	LI Jie
	HE Ya-xiong
	CHENG Zhen-ying
	HUANG Qiang-xian

Cite this article:

LI Rui-jun,LI Jie,HE Ya-xiong, et al. Error Measurement and Modeling Compensation of Three Axis Perpendicularity of Micro-nano CMM[J]. Acta Metrologica Sinica, 2022, 43(4): 452-456.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2022.04.03 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2022/V43/I4/452

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